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MPX200 查看數據表(PDF) - Motorola => Freescale

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MPX200 Datasheet PDF : 8 Pages
1 2 3 4 5 6 7 8
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range (see Figure 2). There are two basic methods
for calculating nonlinearity: (1) end point straight line fit or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worse case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
TEMPERATURE COMPENSATION
Figure 3 shows the typical output characteristics of the
MPX200 series over temperature. The output is directly pro-
portional to the pressure and is essentially a straight line.
The X–ducer piezoresistive pressure sensor element is a
semiconductor device which gives an electrical output signal
MPX200 SERIES
proportional to the pressure applied to the device. This de-
vice uses a unique transverse voltage diffused semiconduc-
tor strain gauge which is sensitive to stresses produced in a
thin silicon diaphragm by the applied pressure.
Because this strain gauge is an integral part of the silicon
diaphragm, there are no temperature effects due to differ-
ences in the thermal expansion of the strain gauge and the
diaphragm, as are often encountered in bonded strain gauge
pressure sensors. However, the properties of the strain
gauge itself are temperature dependent, requiring that the
device be temperature compensated if it is to be used over
an extensive temperature range.
Temperature compensation and offset calibration can be
achieved rather simply with additional resistive components
or by designing your system using the MPX2200 series
sensors.
Several approaches to external temperature compensa-
tion over both – 40 to +125°C and 0 to + 80°C ranges are
presented in Motorola Applications Note AN840.
70
60
LINEARITY
50
ACTUAL
40
30
20
THEORETICAL
SPAN
(VFSS)
10
OFFSET
0
(VOFF)
0
MAX POP
PRESSURE (kPA)
Figure 2. Linearity Specification Comparison
70
60
VS = 3.0 Vdc
P1 > P2
50
40
– 40°C
+25°C
+125°C
SPAN
RANGE
(TYP)
30
20
OFFSET
10
(TYP)
0
0 4.0 8.0
12 16 20
24 28 30
PSI 20 40 60 80 100 120 140 160 180 200
kPa
PRESSURE DIFFERENTIAL
Figure 3. Output versus Pressure Differential
SILICONE GEL
DIE COAT
ÉÉÉÉÉÉÉÉÉÉÉ WIRE BOND
DIFFERENTIAL/GAUGE
DIE
P1
STAINLESS STEEL
METAL COVER
EPOXY
CASE
ÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉ LEAD FRAME
DIE
DIFFERENTIAL/GAUGE ELEMENT
BOND
P2
SILICONE GEL
DIE COAT
ABSOLUTE
DIE
P1
ÉÉÉÉÉÉÉÉÉÉÉ WIRE BOND
ÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉ LEAD FRAME
STAINLESS STEEL
METAL COVER
EPOXY
CASE
DIE
ABSOLUTE ELEMENT
BOND
P2
Figure 4. Cross–Sectional Diagrams (Not to Scale)
Figure 4 illustrates the absolute sensing configuration
(right) and the differential or gauge configuration in the basic
chip carrier (Case 344–15). A silicone gel isolates the die
surface and wire bond from the environment, while allowing
the pressure signal to be transmitted to the silicon dia-
phragm. The MPX200 series pressure sensor operating
characteristics and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media
other than dry air may have adverse effects on sensor perfor-
mance and long term reliability. Contact the factory for in-
formation regarding media compatibility in your application.
Motorola Sensor Device Data
3

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