8501-1 查看數據表（PDF） - TEKTRONIX
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8501-1 Datasheet PDF : 4 Pages
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6430
Sub-Femtoamp Remote
SourceMeter® SMU Instrument
Condensed Measure Specifications 1
Voltage Measurement Accuracy (4-wire sense)3
Range
200.000 mV
2.00000 V
20.0000 V
200.000 V
Max. Resolution
1 µV
10 µV
100 µV
1 mV
Input2
Resistance
>1016W
>1016W
>1016W
>1016W
Accuracy (23°C ± 5°C)
1 Year, ±(%rdg + volts)
0.012% + 350 µV
0.012% + 350 µV
0.015% + 1.5 mV
0.015% + 10 mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15 × accuracy specification)/°C.
Additional Measure Specifications
Output SETTLING Time (typical to 10% of final value): <2s, 1pA and 10pA ranges; <50ms,
100pA through 10nA ranges; <5ms, 100nA through 100mA ranges.
Current Noise: When observed over 1 minute intervals, peak to peak noise will be within
400aA (typical) during 90% of the intervals using Autofilter (5s 10% to 90% rise time), with triax
connectors capped, Autozero OFF, Source Delay = 0, on the 1pA range for at least 3 minutes.
Current Measurement Accuracy (2- or 4-wire sense)4
Range
1.00000 pA
10.0000 pA
100.000 pA
1.00000 nA
10.0000 nA
100.000 nA
1.00000 µA
10.0000 µA
100.000 µA
1.00000 mA
10.0000 mA
100.000 mA
Max.
Resolution
10 aA
100 aA
1 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
Voltage
Burden5
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
Accuracy
(23°C ± 5°C)
1 Year
±(%rdg + amps)
1.0 % + 7 fA
0.50 % + 7 fA
0.15 % + 30 fA
0.050 % + 200 fA
0.050 % + 2 pA
0.050 % + 20 pA
0.050 % + 300 pA
0.050 % + 2 nA
0.025 % + 6 nA
0.027 % + 60 nA
0.035 % + 600 nA
0.055 % + 6 µA
TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±[(0.15 × accuracy specification) +
1fA]/°C.
Input Current: <3fA at 23°C, <40% RH; typically ±0.5fA/°C around 23°C, <40% RH.
Resistance Measurement Accuracy (4-wire sense with remote preamp)
Source I Mode, Auto Ohms
Max.
Range Resolution
Default
Test Current
Normal Accuracy
(23°C ± 5°C)
1 Year, ±(%rdg + ohms)
<2.00000 W 6
20.0000 W
200.000 W
2.00000 kW
20.0000 kW
200.000 kW
2.00000 MW
20.0000 MW
200.000 MW
2.00000 GW
20.0000 GW
200.000 GW
2.00000 TW
20.0000 TW
>20.0000 TW 6
1 µW
100 µW
1 mW
10 mW
100 mW
1W
10 W
100 W
1 kW
10 kW
100 kW
1 MW
10 MW
100 MW
—
—
100 mA
10 mA
1 mA
100 µA
10 µA
1 µA
1 µA
100 nA
10 nA
1 nA
100 pA
10 pA
1 pA
—
Source IACC + Measure VACC
0.098% + 0.003 W
0.077% + 0.03 W
0.066% + 0.3 W
0.063% + 3 W
0.082% + 30 W
0.082% + 300 W
0.085% + 1 kW
0.085% + 10 kW
0.085% + 100 kW
0.085% + 1 MW
0.205% + 10 MW
0.822% + 100 MW
2.06% + 1 GW
Source IACC + Measure VACC
Enhanced Accuracy
(23°C ± 5°C) 7
1 Year, ±(%rdg + ohms)
Measure IACC + Measure VACC
0.068% + 0.001 W
0.048% + 0.01 W
0.040% + 0.1 W
0.038% + 1 W
0.064% + 10 W
0.064% + 100 W
0.067% + 500 W
0.068% + 5 kW
0.070% + 50 kW
0.070% + 500 kW
0.185% + 5 MW
0.619% + 50 MW
1.54% + 500 MW
Measure IACC + Measure VACC
TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15 × accuracy specification)/°C.
Source I Mode, Manual Ohms: Total uncertainty = I source a ccuracy + V measure accuracy
(4-wire sense).
Source V Mode: Total uncertainty = V source accuracy + I measure accuracy (4-wire sense).
6-wire ohms mode: Available using active ohms guard and guard sense (mainframe rear panel
only). Max. Guard Output Current: 50 mA. Accuracy is load dependent. Refer to manual for
calculation formula.
Mainframe Guard Output Resistance: 0.1W in ohms mode.
NOTES
1. Speed = 10 PLC, Autofilter ON, properly zeroed and settled.
2. Source I mode, I = 0.
3. Voltage measurement accuracy is not affected by the remote preamp.
4. Current measurement accuracy is not affected by the remote preamp; however, the 1pA through 100nA ranges
are available only when using a preamp.
5. 4-wire mode.
6. Manual ohms mode only.
7. Source readback enabled, offset compensation ON. Source delay must be programmed such that the source is
fully settled for each reading.
1. 888 .KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
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