8501-1 查看數據表（PDF） - TEKTRONIX
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8501-1 Datasheet PDF : 4 Pages
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6430
Sub-Femtoamp Remote
SourceMeter® SMU Instrument
Condensed System Speeds
Measurement1
Maximum Range Change Rate: 75/second.
Single Reading operation reading rates (rdg/second) for 60Hz (50Hz):
Speed
Fast
Medium
Normal
NPLC/
Trigger Origin
0.01 / internal
0.10 / internal
1.00 / internal
Measure
To GPIB
256 (256)
181 (166)
49 (42)
Source-
Measure3
To GPIB
83 (83)
73 (70)
35 (31)
Source-Measure
Pass/Fail Test2, 3
To GPIB
83 (83)
73 (70)
34 (30)
Condensed Source Specifications4
Voltage Programming Accuracy (4-wire sense)5
Accuracy (1 Year)
Programming
23°C ±5°C
Range Resolution ±(% rdg. + volts)
Noise
(peak-peak)
0.1Hz – 10Hz
200.000 mV
2.00000 V
20.0000 V
200.000 V
5 µV
50 µV
500 µV
5 mV
0.02% + 600 µV
0.02% + 600 µV
0.02% + 2.4 mV
0.02% + 24 mV
5 µV
50 µV
500 µV
5 mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15 × accuracy specification)/°C.
Max. Output power: 2.2W (four quadrant source or sink operation).
Source/SINK Limits: ±21V @ ±105mA, ±210V @ ±10.5mA.
Voltage Regulation: Line: 0.01% of range. Load: 0.01% of range + 100µV.
NOISE 10Hz–1MHz (p-p): 10mV.
Over Voltage Protection: User selectable values, 5% tolerance. Factory default = None.
Current Limit: Bipolar current limit (compliance) set with single value. Min. 0.1% of range.
Current Programming Accuracy (with remote preamp)
Accuracy (1 Year)4
Programming
23°C ±5°C
Range Resolution ±(% rdg. + amps)
Noise
(peak-peak)
0.1Hz – 10Hz
1.00000 pA
10.0000 pA
100.000 pA
1.00000 nA
10.0000 nA
100.000 nA
1.00000 µA
10.0000 µA
100.000 µA
1.00000 mA
10.0000 mA
100.000 mA
50 aA
500 aA
5 fA
50 fA
500 fA
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
1.0 % + 10 fA
0.50 % + 30 fA
0.15 % + 40 fA
0.050 % + 200 f A
0.050 % + 2 pA
0.050 % + 20 pA
0.050 % + 300 pA
0.050 % + 2 nA
0.031 % + 20 nA
0.034 % + 200 nA
0.045 % + 2 µA
0.066 % + 20 µA
5 fA
10 fA
20 fA
50 fA
500 fA
3 pA
20 pA
200 pA
500 pA
5 nA
50 nA
500 nA
TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15 × accuracy specification)/°C.
Max. output power: 2.2W (four quadrant source or sink operation).
Source/Sink Limits: ±10.5mA @ ±210V, ±105mA @ ±21V .
CURRENT Regulation: Line: 0.01% of range. Load: 0.01% of range + 1fA.
VOLTAGE Limit: Bipolar voltage limit (compliance) set with single value. Min. 0.1% of range.
NOTES
1. Reading rates applicable for voltage or current measurements. Auto zero off, autorange off, filter off, display
off, trigger delay = 0, source auto clear off, and b inary reading format.
2. Pass/Fail test performed using one high limit and one low math limit.
3. Includes time to re-program source to a new level before making m easurement.
4. For sink mode, 1pA to 100mA range, accuracy is ±(0.15% + offset*4).
5. Voltage source accuracies are not affected by the remote preamp.
Noise Rejection:
Fast
Medium
Normal
General
NPLC
0.01
0.1
1
NMRR
—
—
60 dB
CMRR
80 dB
80 dB
90 dB
Load Impedance: Stable into 20,000pF on the 100mA through 100µA ranges, 470pF on the
10µA and 1µA ranges, and 100pF on the nA and pA ranges. Refer to the User’s Manual for
details on measuring large capacitive loads.
Common mode voltage: ±42VDC maximum.
Common Mode Isolation: >109W, <1000pF.
Overrange: 105% of range, source and measure.
Max. Voltage Drop Between Input/Output and sense terminals: 5V. (To meet
specified accuracy with 4-wire sense, refer to the User’s Manual.)
Max. Sense Lead Resistance: 10W for rated accuracy.
SENSE INPUT ResistANCE: 1MW.
Mainframe Guard Offset Voltage: 300µV, typical.
Preamp Guard Offset Voltage: 1mV, typical.
Preamp Guard Output Resistance: 110kW.
Source Output modes: Fixed DC level, Memory List (mixed function), Stair (linear
and log).
Source Memory List: 100 points max.
Memory Buffer: 5,000 readings @ 5½ digits (two 2,500 point buffers). Includes
selected measured value(s) and time stamp. Lithium battery backup (3 yr+ battery life).
Digital Interface:
Safety Interlock: Active low input.
Handler Interface: Start of test, end of test, 3 category bits. +5V @ 300mA supply.
Digital I/O: 1 trigger input, 4 TTL/Relay Drive outputs (33V @ 500mA sink, diode
clamped).
Programmability: IEEE-488 (SCPI-1995.0), RS-232, 5 user-definable power-up states plus
factory default and *RST.
Power Supply: 100V–240V rms, 50–60Hz (automatically detected at power up),
100VA max.
EMC: Conforms with European Union Directive 89/336/EEC EN 55011, EN 50082-1, EN 61000-
3-2 and 61000-3-3, FCC part 15 class B.
Safety: Conforms with European Union Directive 73/23/EEC EN 61010-1.
Vibration: MIL-PRF-28800F, Class 3.
WARM-UP: 1 hour to rated accuracies.
DIMENSIONS: 89mm high × 213mm wide × 370mm deep (3½ in × 83⁄8 in × 14 9⁄16 in). Bench
Configuration (with handle and feet): 104mm high × 238mm wide × 370mm deep (41⁄8 in
× 93⁄8 in × 149⁄16 in).
Amplifier: 20mm high × 57mm wide × 97mm deep (0.783 in × 2.225 in × 3.75 in).
WEIGHT: 5.9kg (13 lbs).
ENVIRONMENT: Operating: 0°–40°C, 60% R.H. (non-condensing) up to 35°C. Derate 5%
R.H./°C, 35°–40°C. Storage: –25°C to 65°C. Non-condensing humidity.
1. 888 .KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
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